CRAIC Technologies has developed a broad spectral range microscope, the UVM-1 Ultraviolet Microscope. This unique microscope is designed for high resolution imaging throughout the ultraviolet, visible and near infrared spectral regions. Due to the flexibility of its design, this system is able to imaging from individual wavelengths to broad spectral ranges. These ranges can selected and easily changed by the user.
One of the first applications of this system was to image small scale semiconductor circuits. Below is an image of an area of a patterned wafer that is being imaged in the wavelength range of 279 to 367 nm (FWHM) with specular incident illumination. This allows the operator to image extremely fine detail and to study otherwise colorless materials that absorb in the UV region.