
Topics Covered
Energy Filtered Transmission Electron Microscopy LIBRA®
200 Series EFTEM
Features of Monochromated TEM
Energy Filtered Transmission Electron Microscopy
LIBRA® 200 Series EFTEM
Superior energy resolution now exists in harmony with spot-preserved
spatial resolution only with the Carl
Zeiss electrostatic monochromator on the LIBRA®
200 EFTEM series.

Extention of the TEM information limit when using the
monochromator, Young's fringes from amorphous Tungsten film with (left)
and without (right) monochromator on an aberration corrected LIBRA® 200
TEM, showing a resolution improvement from 0.1 nm to 0.073 nm.
Electron energy loss spectroscopy (EELS) has recently entered a new
dimension with the development of monochromators that reduce the energy
spread of Schottky field emission sources. High resolution EELS enables
access to chemistry, bonding, structure and electronic state
information at the nanoscale.

EELS performance 1.2.3 edges of Rutile, with (blue)
and without (red) monochromator.
Features of Monochromated TEM

Energy resolution pushed to the limit at 200 (left)
and 80 KV (right).
Monochromated TEM offers:
- < 0.2 eV energy resolution
- Preserved spot size under all conditions
- Minimum loss of probe current
- Selectable energy widths
- Access to low-loss region yielding valence, band-gap and plasmon
spatial information
- Ease of use: no significant alignments required.
Source: “High Resolution EELS with an Electrostatic
Monochromator” by Carl Zeiss
For more information on this source, please visit Carl Zeiss.