Scanning Acoustic Microscope - PVA Templa SAM 400 QUAD
SAM 400 QUAD is a high performance tool enabling non destructive acoustic investigations for high throughput analysis, quality control and research applications. It features a new high speed linear motion scanner and new rf and transducer technologies of up to 400 MHz, controlled through a user friendly graphical interface.
A new master/slave concept enables arrays of four transducers to acquire simultanous acoustic images.
Built to semiconductor industry standards around a core platform that utilises the latest production and research technology, the SAM QUAD SCAN can accurately handle wafers up to 400 mm. Ultrasound frequency range up to 500 MHz with transducer from
3 MHz - 400 MHz.
Scanning range x;y: 200µm-200µm-430 mm x 430 mm
Auto focus for each transducer