Carl Zeiss Releases ORION NanoFab Ion Beam Microscope

Carl Zeiss has launched an advanced 3-in-1 multibeam ion microscope for sub-10nm nanostructuring. The new ORION NanoFab is touted to be only system available in the market that covers the entire range of nanomachining to micromachining utilizing helium, gallium and neon ion beams incorporated in a single system.

With the help of ORION NanoFab, users can fabricate sub-10 nm nanostructures with both speed and accuracy. In addition, users can easily switch between helium, gallium and neon beams.

Key Features

The product features of the ORION NanoFab Ion Beam Microscope are:

  • Neon beam to machine nanostructures at high speed and achieve high throughput
  • Helium beam to produce delicate sub-10 nm structures
  • Optional gallium FIB to eliminate bulk material
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