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SOPRA GES5E for R&D Spectroscopic Ellipsometer

The GES5E is the SOPRA core instrument for R&D applications. GES5E integrates advanced and well proven opto-mechanical designs coupled to high performance electronics, Spectrometers and spectrographs and user friendly WindowsTm software. GES5E is the most recent model of 5 generations of spectroscopic ellipsometers developed by SOPRA.

With over than 20 years of experience in Spectroscopic Ellipsometry technology, SOPRA is widely recognized today as a prime player in this market today.

As a consequence SOPRA Spectroscopic Ellipsometers are currently used as the ReferenceTM tools for Thin Film measurements in both R&D and the Industry.

The unique advantage of the GES5E Platform is that High Resolution measurement mode and Fast measurement mode can coexist on the same platform. This allows material development qualification but also process development control by Fast routine mapping measurements.

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