PANalytical's X'Pert PRO Materials Research Diffractometer is the most flexible system available for X-ray diffraction studies for:
- advanced materials science and nanotechnology
- metrologic characterization in semiconductor process development
It can handle a wide range of applications, and is especially suitable for thin film analysis applications such as:
- rocking curve analysis and reciprocal space mapping
- reflectometry and thin film phase analysis
- residual stress and texture analysis
As well as the proven standard version of the X'Pert PRO MRD system, a number of special versions exist:
- in-plane diffraction to measure diffraction from lattice planes that are perpendicular to the sample
surface
- an extended version allowing mounting of an X-ray mirror and a high-resolution monochromator in-line,
increasing the intensity of the incident beam
- high-resolution XRD analysis requirements of the semiconductors, thin films, and advanced materials industries
- an advanced tool for thin film process development