The most accurate instrument for Thin Films characterization
is the SEMILAB SOPRA core instrument for R&D applications. GES5E
integrates advanced and well proven opto-mechanical designs coupled to high
performance electronics, Spectrometers and spectrographs and user friendly Windows
is the most recent model of 5 generations of spectroscopic ellipsometers developed
by SEMILAB SOPRA.
The unique advantage of the GES5E
Platform is that High Resolution measurement mode and Fast measurement mode
can coexist on the same platform. This allows material development qualification
but also process development control by Fast routine mapping measurements.
Optical Platform allows various measurement mode from Standard Ellipsometry
to generalized Ellipsometry going through photometric measurements (in Transmission
and Reflection), Scatterometry, luminescence measurements. All measurements
are made automatically as a function of: wavelength, angle of incidence, polarization
state and time. Standard spectral range is 230-900nm, and can be extended in
both DUV and NIR regions by selecting the adequate options (please refer to
SE Options). Material advanced characterization can also be run on the GES5E
by coupling environmental chamber, heating plate, liquid cells and Cryostats.
The last development in that field is the EPA (Ellipsometric Porosimeter Atmospheric)
option allowing porosity measurement of thin films.
and its numerous options allows to cover the most advanced the R&D applications
in material science today.
is widely used in Research Laboratories and Universities working in the following
fields: Semiconductors, Optics, Optical Telecommunications, Flat Panel Displays,
Data Storage, Thin Metals, Chemistry, Biology, organic applications etc…