panel tester Gen5 is designed to measure properties of thin film solar cells
that meet the GEN-5 standard.
It incorporates an ellipsometer, a non-contact resistivity mapper and a haze
Spectroscopic Ellipsometry (SE) is used to detect the change of the polarization
state of light after reflection from a plane surface. Parameters accessible
from SE include: thickness (from nm to several µm’s), optical properties
(refractive indices, extinction coefficient, band gap, absorption and transmission)
and material properties (roughness, composition, crystallinity). Single layer
and multilayer structures on various substrates (glass, metal, silicon, and
plastic foil) can be measured and analyzed using a very small probe area. The
SE5-PV is a Pilot line and Production Control system orientated towards mapping
the deposition uniformity over large surfaces areas. The solution provides large
process tool suppliers and end users the ability to improve the ramp up of the
PV fabrication steps.