Designed for semiconductor, MOCVD, and other gas flow control applications that require
a high purity all-metal flow path, the Brooks GF Series mass flow controllers deliver
outstanding performance, reliability, and flexibility.
Highlights of the GF series industry-leading
features include: ultra fast 300 millisecond settling time, MultiFlo™ gas and
range programmability, optional pressure transient insensitivity (PTI), local display,
extremely low wetted surface area, and corrosion resistant Hastelloy® sensor tube and
valve seat. The GF series has been marathon tested to over three times the semiconductor
industry standard for reliability, ensuring repeatable low-drift performance over time. An
independent diagnostic/service port permits users to troubleshoot or change flow
conditions without removing the mass flow controller from service.
The flagship GF125 is a second generation multi-variable, pressure transient insensitive
mass flow controller. This product builds upon Brooks' leadership position in pressure
transient insensitive (PTI) mass flow controller technology, minimizing process gas flow
variation due to pressure and temperature fluctuations. The GF125 enables customers to
simplify and reduce the size and cost of gas panels by eliminating the need for point of
use pressure regulators, pressure transducers, and associated hardware.
MultiFlo™ gas and range programmability, a patented technology developed and refined
by Brooks over the last 10 years, has changed the mass flow controller industry by
offering customers the ability to select new gas calibrations and full scale ranges without
the trouble and cost of removing the mass flow controller from the gas line. The GF Series
fourth generation MultiFlo technology continues to lead the market with the most
accurate and broadest range performance through extensive refinement and physical
validation on critical process gases.
The GF Series is a highly configurable platform based on a novel modular architecture.
Already widely adopted by semiconductor, vacuum thin film, solar, and related
customers, the GF Series feature set was carefully selected to enable drop-in replacement
and upgrade of most brands of metal-seal mass flow controllers, including the former
Celerity, UNIT, Tylan, and Mykrolis brands. With the wide range of options and features
available, the GF Series provides users with a path to simplification and standardization,
greatly reducing spares inventory and support costs.