Brooks digital capacitance manometers incorporate industry-leading features that combine to improve measurement reliability, minimize drift, resist diaphragm contamination, and minimize thermal effects. The result is an exceptionally reliable capacitance manometer family for all vacuum measurement applications.
An important benefit of a Brooks capacitance manometer is its advanced Mark-IV sensor. The sensor chamber contains surface areas that are not used in the pressure measurement; these surfaces provide locations for particles and condensable vapors to accumulate without affecting the sensor, dramatically reducing the need for re-zeroing and greatly extending sensor life. The sensor diaphragm is made from corrosion resistant Inconel®.
Because they are fully digital devices, Brooks capacitance manometers operate over a wide dynamic range with extremely good accuracy.
XacTorr CMX Series (Heated Gauges)
The XacTorr CMX series gauges are premium, heated gauges, that use patented, dual zone heating to ensure 0.1°C temperature uniformity. The sensor very quickly recovers from thermal events and is virtually immune to ambient temperature changes. Three operating temperatures are offered, 45°C, 100°C, and 160°C with full-scale measurement ranges from 100 milliTorr to 1000 Torr.
The gauges include an RS-485 dataport that enables in-situ monitoring and troubleshooting without disturbing communication with the vacuum chamber control system. XacTorr CMX devices offer RS-485, DeviceNet, or analog 0 – 10 Vdc communication.
Features of the XacTorr CMX Series Digital Capacitance Manometers
Flexible digital signal processor
based electronics eliminates manual potentiometers
and drift associated with the aging of old-style
- Multi-decade digital calibration provides superior
window of “known accuracy”.
- Real-time compensation of ambient temperature
effect for improved measurement repeatability
- lntelligent zero adjustment, local push-button and remote zeroing for ease of maintenance and improved long-term repeatability.
lntelli-Touch Zeroing ensures that the CMX Series
cannot be zeroed if the pressure is too high or if the
gauge has not reached a stabilized operating
temperature - a common operator error with analog
Highly effìcient dual-zone temperature control:
- Real-time temperature control of the sensor for
improved measurement stability and repeatability.
- Fast warm-up with intuitive temperature status LED.
- Rapid response to changing system conditions
Unique corrosion resistant, shielded sensor design offers
superior protection against condensable process by
products, which can degrade accuracy and shorten the
life of the instrument.