The Sensofar’s PLµ 1300 is a portable Optical Imaging Profiler capable of measuring 3D information of technical surfaces with the use of Interferential or Confocal technologies. The sensor has been designed to have all optical components sealed in order to be placed in production environments, where dust and particles can go inside. With a total weight less than 4.5 Kg and up to 5 meter single cable, the operator takes the sensor safely and places it onto the surface under inspection. Focusing of the surface is achieved manually with a smooth touch micrometer and 8 mm travel range. Finer focus adjustment is done with autofocus function and software virtual joystick of the Z stage. Acquisition and analysis recipes make the measurement as easy as just one button click and Pass/Fails signal.
Depending on the selected optics for a given application, the field of view can vary from 0.15 x 0.1 up to 3.4 x 2.5 mm². By default PLµ 1300 comes with interferential technology that is able to achieve the highest axial resolution (down to 0.1 nm in PSI mode, and l/2 range), and up to 400 µm scanning range for VSI. It is also possible to do Extended PSI that keeps the PSI resolution while increasing the vertical scanning range. Confocal technology can be added optionally to measure higher local slopes and rougher surfaces. Surfaces up to 70 degrees, with 0.95NA objectives, and down to 0.1 µm lateral sampling with high magnification objectives, can be measured. PLµ 1300 has been designed for control production environments where the samples are big and heavy and cannot be moved or cut to be inspected by a laboratory based profiler. The Optical Profiler core is based on the well proven Sensofar’s technology Optical Profiler Series with numerous customers worldwide from semiconductor industry, paper and printing, metal, optical and micro-optical, car, biomedical, material testing,etc.