The Ionfab500Plus was designed mainly for ultra high quality optical thin films and was first delivered in the year 1983. The deposition tool was the first commercially available ion beam sputter deposition system for ring laser gyroscope manufacture. Recently, customers have demonstrated mirrors with less than 20ppm on a commercially available system using the Ionfab500Plus.
The major features of the Ionfab 500Plus are:
The system has been specially designed to meet the needs of customers demanding high throughput.
This is enabled by the use of the 4 x 10" planetary substrates and the ability to use 14" targets.
Another major benefit to customers who need high throughput is the use of up to three targets, implying that separate material layers may be deposited without breaking the vacuum.