The FRT MicroProf 200 TTV MHU Automated Wafer Metrology Tool
The main features and capabilities of the FRT MicroProf 200 TTV MHU automated non-contact wafer metrology tool are demonstrated. The tool includes a multi-cassette system to deal with several samples, and it can deal with wafers from 2" to 8". It can cater for up to 100 wafers per hour.
Run time - 1:19min