Momentive Performance Materials Quartz Inc. (MPM) has increased and expanded its manufacturing capacity of tantalum carbide coatings (TaC) in response to the larger demand for silicon carbide power (SiC) devices and increased need for improved dimensional control for gallium nitride (GaN) LEDs. With the expansion, MPM has the capability to produce up to 750 mm diameter parts, versus the 500 mm previous limitation.
The diameter increase can help enable next generation SiC epi tools and can provide improved dimensional control for the current GaN tools now using alternate protective coatings.
MPM’s TaC is manufactured using a proprietary coating process, which yields excellent resistance to hot hydrogen during epitaxial processes. SiC coatings can start to decompose at 1200-1400 °C, whereas TaC generally is stable to over 2000 ˚C. Additionally, the coatings can provide exceptional dimensional control and, therefore, a uniform and conformal coating, even on wafer pockets and complex shapes. TaC coatings are used in MOCVD tools for the production of GaN and SiC devices.
Momentive Performance Materials Quartz Inc. is an indirect wholly-owned subsidiary of Momentive Performance Materials Inc.
For more information, visit www.Momentive.com.
About the Company
Momentive Performance Materials Inc. is a global leader in silicones and advanced materials, with a 70-year heritage of being first to market with performance applications for major industries that support and improve everyday life. The Company delivers science-based solutions by linking custom technology platforms to opportunities for customers. Momentive Performance Materials Inc. is an indirect wholly-owned subsidiary of Momentive Performance Materials Holdings LLC.
Source: http://www.momentive.com/