LayTec is proud to announce the sale of an EpiCurveTriple TT to a leading LED manufacturer in the USA. The in-situ system will be used for GaN LED production in a multiple-ring MOCVD reactor. The unique combination of a Curve optical head for wafer bowing control and 3 EpiTT heads for temperature and reflectance measurements will be the first metrology system of this kind.
First edition of EpiTriple TT (without Curve® optical head) installed on a CCS reactor
EpiCurveTriple TT is specially designed for application in huge showerhead MOCVD reactors like CRIUS for GaN LED production and GaN/Si applications. Like in LayTec's EpiTriple TT, the three EpiTT heads of EpiCurveTriple TT measure reflectance and emissivity-corrected pyrometry at 3 different radial positions and enable an absolute temperature control of the grow on all heating zones of the succeptor. The accuracy of the temperature measurement after calibration by LayTec's new AbsoluT tool is better than ±1 K. The online growth-rate analysis with the accuracy up to ±0.001nm/s is, of course, also possible.
Additionally to this, the Curve head is an ideal tool for strain control and wafer bow measurements. It helps to minimize bowing-related non-uniformities in GaN LED production on 4" and larger wafers.