Hiden SIMS bolt-on mass spectrometers and ion guns enable a complete SIMS facility to be added to diverse analytical UHV surface analysis facilities, and the latest Hiden EQS probe now offers the inclusion of an integrated SNMS mode to provide the dual roles of sputtered neutral and secondary ion mass spectrometry.
A complete SIMS facility mounted on a single conflat flange.
The dual techniques are beneficial for the measurement of optical and metallurgical coatings, alloys, corrosion layers and architectural coatings for example, enabling direct quantification of concentration over the full range from trace level to 100%.
The high-transparency electron impact ioniser at the immediate entry region to the probe ensures efficient ionisation of sputtered neutrals and optimum transmission efficiency for secondary ions. Both SIMS and SNMS can be combined throughout a continuous measurement sequence to provide quantified depth profiling data through the widest concentration range.
The full product range includes both gas and metal-sourced ion guns. Both the probe and the ion guns require a chamber mounting port diameter of just 38mm(1.5 inches) diameter.
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