Spectroscopic Ellipsometer and Life Time Technology for Flat Panel Testing and Characterization

Building on over three decades of optical expertise in spectrographs and spectrometers, SEMILAB offers a range of Table Top and Framed Spectroscopic Ellipsometers for R&D activities on thin film characterization and material science (Figure 1). SEMILAB continuously expands the wavelength coverage of SEMILAB Spectroscopic Ellipsometers from Far UV (135nm) to Far Infra-Red (25µm) with fast measurement and/or high resolution modes.

SEMILAB offers a range of Table Top and Framed Spectroscopic Ellipsometers for R&D activities on thin film characterization and material science.

Figure 1. SEMILAB offers a range of Table Top and Framed Spectroscopic Ellipsometers for R&D activities on thin film characterization and material science.

SEMILAB Spectroscopic Ellipsometers

SEMILAB Spectroscopic Ellipsometers are available from manual to completely automated setup with automatic sample loading from cassettes (SE5). In addition, SEMILAB provides the option to integrate several techniques, including Porosimetry, FTIR, GXR onto the same Ellipsometer to perform highly accurate analysis on intricate structures. This approach allows for more applications, supporting SEMILAB’s place in the research and development field with the installation of over 600 instruments worldwide.

µ-PCD Lifetime

Lifetime is a property of a bulk semiconductor material, telling the amount of time, on average, an excess carrier exists in a semiconductor material before recombining to achieve equilibrium. The same property is also referred as ‘recombination lifetime, ‘carrier lifetime,’ and ‘minority carrier lifetime.’

A semiconductor consisting of a perfect crystal lattice and free from contamination has a long lifetime. The presence of any imperfections or contamination will shorten the lifetime of a semiconductor material. Hence, monitoring lifetime is an ideal approach to confirm the presence of contamination.

Key Features of µ-PCD Lifetime

The following are the key features of µ-PCD Lifetime:

  • Requires surface passivation such as corona charging, chemical passivation, or thermal oxide
  • High lateral resolution (down to 0.5mm)
  • Fast measurement speed of 20 wafers/hour (4400 points)
  • No wafer thickness limitation
  • Detects iron concentration both in FZ and CZ wafers, crystal defects, impurities caused by transition metal contamination and heavy metal contamination

Lifetime Measurement

Microwave PCD (µ-PCD) is a common technique used for lifetime measurement (Figure 2). Many Semilab products are equipped with µ-PCD measurement technology. The WT-2000 is one such product that yields maps of lifetime measurements for wafers, through a benchtop system. The WT-2500 provides similar capability through FOUP and/or Open Casette system to measure lifetime for up to 300mm wafers. Semilab offers WT-2000MCT for narrow band semiconductors to perform lifetime measurements as a function of temperature.

Microwave PCD (µ-PCD) is a common technique used for lifetime measurement.

Figure 2. Microwave PCD (µ-PCD) is a common technique used for lifetime measurement.

FPT- Series Products

FPT- series products are designed for flat panel testing and characterization. The product is dedicated for the characterization of LCD and AMOLED TFT panels up to GEN 8.5. It can couple various measurement probes into a single platform, yielding high precision, highly accurate measurements across the entire surface of flat panels. FPT can be integrated with spectroscopic ellipsometry, line mura detection, u-PCR, Raman crystallinity, four point probe, stress measurement, contact angle measurement, and spectroscopic reflectometry.

FPT- series products are designed for flat panel testing and characterization.

Figure 3. FPT- series products are designed for flat panel testing and characterization.

Spectroscopic ellipsometery can determine refractive index and optical thickness of multi-layered oxide and semiconductor structures at different process steps. Monitoring the ELA process quality can be achieved by measuring line mura density, u-PCR, and crystallinity.

About Semilab Semiconductor Physics Laboratory

Semilab Semiconductor Physics Laboratory designs, produces and sells metrology equipment for the characterization of semiconductor and photovoltaic materials, for monitoring the manufacturing process of semiconductor devices and solar cells, and also for R&D purposes in these areas.

Semilab offers a variety of measurement techniques; most of them are non-contact and non-destructive. Many of Semilab's technologies can be flexibly integrated in different platforms, ranging from simple handheld devices and table-top systems with high resolution mapping capability to fully automated stand-alone production control tools for mid-range and high-level fablines. Semilab also offers in-line measurements for solar cell production lines.

Their strategy is to continuously improve our products, and to offer flexible solutions for our customers' needs with high-value products for a reasonable price. To accomplish this, Semilab employs more than 70 physicists and 90 engineers worldwide. Semilab also participates in various international R&D projects, and Semilab has a frame agreement for metrology development with IMEC, the largest international research center for the development of semiconductor products.

Semilab carries out our work in a responsible way; Semilab provides various benefits to our employees and support important cases such as scientific education.

This information has been sourced, reviewed and adapted from materials provided by Semilab Semiconductor Physics Laboratory.

For more information on this source, please visit Semilab Semiconductor Physics Laboratory.

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