Sub-Micron Resolution X-Ray Photoelectron Imaging

The Thermo Scientific ESCALAB 250 can be used to perform analyses demanding high sensitivity and spatial resolution. The examples presented in this article demonstrate many of the key capabilities of the Thermo Scientific ESCALAB 250.

The monochromatic X-ray source provides fast imaging. It is possible to acquire a photoelectron image within a few seconds for precise sample alignment and produce a high quality photoelectron image within a few minutes. The images presented in this article have below 1µm spatial resolution and are acquired with 256 x 256 pixels.

Gold Pad on GaAs

Microelectronic devices offer a critical evaluation of the resolution of any imaging instrument. This example shows the analysis of gold features deposited on a gallium arsenide substrate. The retrospective line scan at the position seen on the high spatial resolution image demonstrates sub micron spatial resolution (Figure 1).

Retrospective line scan from image

Figure 1. Retrospective line scan from image

Rapid XP Image for Alignment

Figure 2 shows Au 4f7/2 X-ray photoelectron image (peak - background).

Gold X-ray Photoelectron image (peak - background) 200µm field of view, 12s acquisition

Figure 2. Gold X-ray Photoelectron image (peak - background) 200µm field of view, 12s acquisition

The conditions are summarized below:

Total acquisition time 12s
Pixel resolution 256 x 256
Field of view 200µm
Monochromated X-ray spot size 650µm

High Spatial Resolution XPS Image

Figure 3 shows Au 4f7/2 X-ray photoelectron image (peak - background).

Gold X-ray photoelectron image (peak - background) 120 mm field of view, 5min acquisition

Figure 3. Gold X-ray photoelectron image (peak - background) 120 mm field of view, 5min acquisition

The conditions are as follows:

Total acquisition time 5min
Pixel resolution 256 x 256
Field of view 120µm
Monochromated X-ray spot size 650µm

This information has been sourced, reviewed and adapted from materials provided by Thermo Fisher Scientific – Materials & Structural Analysis.

For more information on this source, please visit Thermo Fisher Scientific – Materials & Structural Analysis.

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