With over 50 years of experience, Process Insights specializes in providing gas analyzers that deliver great results, the success of which relies on two factors:
- Effective movement of the gas sample into the analyzer
- Analytical capability of the detector used
The application requires a specific match with the pressure reducing inlets and multiplexing sample selectors. On top of this, the gas analyzer must have the correct sensitivity, resolution, and flexibility to deliver the data that is required.
When paired with the right inlet, quadrupole mass spectrometers have a diverse range of features that make them perfectly suited for numerous applications such as controlling gas compositions in a vacuum, isotopic ratio determination, and trace volatiles in exhaled breath samples.
This article will discuss Process Insights’ complete array of sample inlets and standard mass spectrometers. To determine which pairing is right for you, first identify the inlet type matching the sample specifications. Then, choose the proper mass spectrometer based on analytical capabilities. It is this pairing service that has made Process Insights a world leader in high quality gas analysis instrumentation.
Fixed Pressure Inlets
Gate Valve for sample pressures < 1x10-4 Torr
- For close-mounting to vacuum chamber
- DN 40 CF (2-3/4”) mounting flange
- Manual or pneumatically operated
- Chamber and mass spectrometer separable from pumping station for ease of installation
Gate Valve with a Bypass for sample pressures between 1x10-4 and 5 Torr
- For close-mounting to vacuum chamber
- DN 40 CF (2-3/4”) mounting flange
- One or two discreet bypass paths equipped with pressure reducing orifices
- A variety of orifices are available. Examples are:
- 0.0001 to 0.002 Torr - 1500 micron
- 0.002 to 0.03 Torr - 400 micron
- 0.03 to 0.5 Torr - 100 micron
- 0.5 to 5 torr - 30 micron
- Manual or pneumatically operated with automatic switch-over between ranges
- Chamber and mass spectrometer separable from pumping station for ease of installation
Gate Valve/Bypass Inlet Diagram
Applications
- Vacuum chamber diagnostics, outgassing, bakeout, pump performance, contaminants
- Vacuum processing
- Leak detection
- Plasma enhanced, low pressure, and metal organic chemical vapor deposition, reactive ion etching
Capillary: 5-1000 Torr
- Sized to allow sampling from a range of fixed pressures, from 5 to 1000 Torr absolute
- Options for one, two, or three capillaries entering the inlet flange
- Standard and custom capillary lengths available
- Heated and unheated options available
Capillary Inlet Diagram
Applications
- Multipoint process sampling
- Optimized for evolved gas analysis from TGA equipment
- Upstream and downstream comparison
- Chemical vapor deposition, metal organic chemical vapor deposition, atomic layer deposition
Direct Inlet with Bypass: Measuring from a flowing gas at, or above, atmospheric pressure
- Short capillary built into chamber inlet flange
- Bypass tee mounted on inlet flange
- Heated and unheated options available
Direct Inlet with Bypass Tee Diagram
Applications
- Thermal analysis/TGA-MS
- Analysis of flowing gas streams
- Chemical vapor deposition, metal organic chemical vapor deposition, atomic layer deposition
Multiport stream selection for measuring from several points of a flowing gas at, or above, atmospheric pressure
- Multiport valves available, from 4 to 32 ports
- Used with direct inlet and bypass tee
- Available in heated and unheated variants
Multiport Valve Diagram
Applications
- Pharmaceutical reactors
- Bioreactors
- Multipoint gas purity
- Air quality measurements
- Multi-stage process monitoring
Differentially Pumped Inlet for fast clearing
- Versions available for thermogravimetric and evolved gas analysis
- Typical transit times <<1 second
- Heated or unheated options available
Differentially Pumped Diagram
Applications
- Thermal analysis/TGA-MS
- Bioreactors
- Ambient pressure process gas analysis
- Combustion analysis
Variable Pressure Inlets
Allows active pressure control for different sampling pressures over the 5 Torr-Atmosphere range
- Actively maintains constant pressure within the mass spectrometer as the sample pressure changes
- Utilizes a separate sample pump
- Multiport sample selection available
Applications
- Pharmaceutical drying
- Bioreactors
- Pump down monitoring
- Altitude studies
Variable Pressure Inlets
Mass Spectrometer Models
There are three models of analyzer, each being able to accommodate various levels of research complexity. The MAX300-CAT, MAX300-LG, and VeraSpec-HRQ gas analyzers can also be enhanced with different options of mass range and detector, and customized to the requirements of the application.
MAX300-CAT Benchtop Gas Analyzer
The MAX300-CAT has a small footprint, making it suited for benchtop gas analysis. This does not limit its power however, as it can still measure dynamic gas samples in a wide range of applications.
- Mass range options: 1-100, 300 Dalton
- Quadrupole rod diameter: 6 mm
- Quantitative analysis rate: 1-5 seconds/component
- Number of components: Unlimited
- Detection limits*:
- Faraday only configuration: 10 ppm
- Electron multiplier: 50 ppb
- Precision (% RSD)**: 0.5
- Stability/precision over 30 days continuous analysis (% RSD): 1.5
MAX300-CAT Benchtop Laboratory Gas Analzyer
MAX300-LG Laboratory Gas Analyzer
When precision, repeatability, and absolute quantitative measurements are imperative, the MAX300-LG mass spectrometer should be your first choice.
- Mass range options: 1-100, 300, 500 Dalton
- Quadrupole rod diameter: 19 mm
- Number of components: Unlimited
- Quantitative analysis rate: 0.1 seconds/component
- Automated detector switching within a single scan
- Detection limits*:
- Electron multiplier: 10 ppb
- Membrane inlet option (MIMS): 0.01 ppb
- Precision (%RSD)**: 0.25
- Stability/precision over 30 days continuous analysis (% RSD): 0.5
* Matrix dependent
** Based on the analysis of 1% argon
MAX300-LG Laboratory Gas Analzyer
VeraSpec-HRQ High Resolution Quadrupole Mass Spectrometer
The VeraSpec-HRQ delivers superior versatility, ion transmission, resolution and abundance sensitivity for the precision isotopic analysis of low molecular weight gases.
- Mass range options: 1-50, 250 Dalton
- Quadrupole rod diameter: 19 mm
- Resolution: 4000 M/ΔM FWHM at m/z 2
- Abundance sensitivity: 107
VeraSpec-HRQ High Resolution Quadrupole Mass Spectrometer
This information has been sourced, reviewed and adapted from materials provided by Process Insights - Mass Spectrometry.
For more information on this source, please visit Process Insights – Mass Spectrometers.