What are the Capabilities of Gas Analysis?

With over 50 years of experience, Extrel specializes in providing gas analyzers that deliver great results, the success of which relies on two factors:

  1. Effective movement of the gas sample into the analyzer
  2. Analytical capability of the detector used

The application requires a specific match with the pressure reducing inlets and multiplexing sample selectors. On top of this, the gas analyzer must have the correct sensitivity, resolution, and flexibility to deliver the data that is required.

When paired with the right inlet, quadrupole mass spectrometers have a diverse range of features that make them perfectly suited for numerous applications such as controlling gas compositions in a vacuum, isotopic ratio determination, and trace volatiles in exhaled breath samples.

This article will discuss Extrel’s complete array of sample inlets and standard mass spectrometers. To determine which pairing is right for you, first identify the inlet type matching the sample specifications. Then, choose the proper mass spectrometer based on analytical capabilities. It is this pairing service that has made Extrel a world leader in high quality gas analysis instrumentation.

Fixed Pressure Inlets

Gate Valve for sample pressures < 1x10-4 Torr

  • For close-mounting to vacuum chamber
  • DN 40 CF (2-3/4”) mounting flange
  • Manual or pneumatically operated
  • Chamber and mass spectrometer separable from pumping station for ease of installation

Gate Valve with a Bypass for sample pressures between 1x10-4 and 5 Torr

  • For close-mounting to vacuum chamber
  • DN 40 CF (2-3/4”) mounting flange
  • One or two discreet bypass paths equipped with pressure reducing orifices
  • A variety of orifices are available. Examples are:
    • 0.0001 to 0.002 Torr - 1500 micron
    • 0.002 to 0.03 Torr - 400 micron
    • 0.03 to 0.5 Torr - 100 micron
    • 0.5 to 5 torr - 30 micron
  • Manual or pneumatically operated with automatic switch-over between ranges
  • Chamber and mass spectrometer separable from pumping station for ease of installation

Gate Valve/Bypass Inlet Diagram

Gate Valve/Bypass Inlet Diagram

Gate Valve/Bypass Inlet Diagram

Applications

  • Vacuum chamber diagnostics, outgassing, bakeout, pump performance, contaminants
  • Vacuum processing
  • Leak detection
  • Plasma enhanced, low pressure, and metal organic chemical vapor deposition, reactive ion etching

Capillary: 5-1000 Torr

  • Sized to allow sampling from a range of fixed pressures, from 5 to 1000 Torr absolute
  • Options for one, two, or three capillaries entering the inlet flange
  • Standard and custom capillary lengths available
  • Heated and unheated options available

Capillary Inlet Diagram

Capillary Inlet Diagram

Applications

  • Multipoint process sampling
  • Optimized for evolved gas analysis from TGA equipment
  • Upstream and downstream comparison
  • Chemical vapor deposition, metal organic chemical vapor deposition, atomic layer deposition

Direct Inlet with Bypass: Measuring from a flowing gas at, or above, atmospheric pressure

  • Short capillary built into chamber inlet flange
  • Bypass tee mounted on inlet flange
  • Heated and unheated options available

Direct Inlet with Bypass Tee Diagram

Direct Inlet with Bypass Tee Diagram

Applications

  • Thermal analysis/TGA-MS
  • Analysis of flowing gas streams
  • Chemical vapor deposition, metal organic chemical vapor deposition, atomic layer deposition

Multiport stream selection for measuring from several points of a flowing gas at, or above, atmospheric pressure

  • Multiport valves available, from 4 to 32 ports
  • Used with direct inlet and bypass tee
  • Available in heated and unheated variants

Multiport Valve Diagram

Multiport Valve Diagram

Multiport Valve Diagram

Applications

  • Pharmaceutical reactors
  • Bioreactors
  • Multipoint gas purity
  • Air quality measurements
  • Multi-stage process monitoring

Differentially Pumped Inlet for fast clearing

  • Versions available for thermogravimetric and evolved gas analysis
  • Typical transit times <<1 second
  • Heated or unheated options available

Differentially Pumped Diagram

Differentially Pumped Diagram

Differentially Pumped Diagram

Applications

  • Thermal analysis/TGA-MS
  • Bioreactors
  • Ambient pressure process gas analysis
  • Combustion analysis

Variable Pressure Inlets

Allows active pressure control for different sampling pressures over the 5 Torr-Atmosphere range

  • Actively maintains constant pressure within the mass spectrometer as the sample pressure changes
  • Utilizes a separate sample pump
  • Multiport sample selection available

Applications

  • Pharmaceutical drying
  • Bioreactors
  • Pump down monitoring
  • Altitude studies

Variable Pressure Inlets

Variable Pressure Inlets

Variable Pressure Inlets

Mass Spectrometer Models

There are three models of analyzer, each being able to accommodate various levels of research complexity. The MAX300-CAT, MAX300-LG, and VeraSpec-HRQ gas analyzers can also be enhanced with different options of mass range and detector, and customized to the requirements of the application.

MAX300-CAT Benchtop Gas Analyzer

The MAX300-CAT has a small footprint, making it suited for benchtop gas analysis. This does not limit its power however, as it can still measure dynamic gas samples in a wide range of applications.

  • Mass range options: 1-100, 300 Dalton
  • Quadrupole rod diameter: 6 mm
  • Quantitative analysis rate: 1-5 seconds/component
  • Number of components: Unlimited
  • Detection limits*:
    • Faraday only configuration: 10 ppm
    • Electron multiplier: 50 ppb
  • Precision (% RSD)**: 0.5
  • Stability/precision over 30 days continuous analysis (% RSD): 1.5

MAX300-CAT Benchtop Laboratory Gas Analzyer

MAX300-CAT Benchtop Laboratory Gas Analzyer

MAX300-LG Laboratory Gas Analyzer

When precision, repeatability, and absolute quantitative measurements are imperative, the MAX300-LG mass spectrometer should be your first choice.

  • Mass range options: 1-100, 300, 500 Dalton
  • Quadrupole rod diameter: 19 mm
  • Number of components: Unlimited
  • Quantitative analysis rate: 0.1 seconds/component
  • Automated detector switching within a single scan
  • Detection limits*:
    • Electron multiplier: 10 ppb
    • Membrane inlet option (MIMS): 0.01 ppb
  • Precision (%RSD)**: 0.25
  • Stability/precision over 30 days continuous analysis (% RSD): 0.5

* Matrix dependent

** Based on the analysis of 1% argon

MAX300-LG Laboratory Gas Analzyer

MAX300-LG Laboratory Gas Analzyer

VeraSpec-HRQ High Resolution Quadrupole Mass Spectrometer

The VeraSpec-HRQ delivers superior versatility, ion transmission, resolution and abundance sensitivity for the precision isotopic analysis of low molecular weight gases.

  • Mass range options: 1-50, 250 Dalton
  • Quadrupole rod diameter: 19 mm
  • Resolution: 4000 M/ΔM FWHM at m/z 2
  • Abundance sensitivity: 107

VeraSpec-HRQ High Resolution Quadrupole Mass Spectrometer

VeraSpec-HRQ High Resolution Quadrupole Mass Spectrometer

This information has been sourced, reviewed and adapted from materials provided by Extrel CMS, LLC.

For more information on this source, please visit Extrel CMS, LLC.

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