In-Line On-The-Fly - Overview and Solutions Available for Wafer Measurements in Production Lines

Semilab designs, produces and sells metrology equipment for the characterization of semiconductor and photovoltaic materials, for monitoring the manufacturing process of semiconductor devices and solar cells, and also for R&D purposes in these areas. Semilab offers a variety of measurement techniques; most of them are non-contact and non-destructive. Many of Semilab's technologies can be flexibly integrated in different platforms, ranging from simple handheld devices and table-top systems with high resolution mapping capability to fully automated stand-alone production control tools for mid-range and high-level fablines. Semilab also offers in-line measurements for solar cell production lines.

In-Line On-The-Fly Products

In-Line On-The-Fly products are designed to measure all wafers in a production line. They are meant to be mounted over the conveyor belt that moves continuously, and measure the samples during movement. This prevents our on-the-fly products from slowing down the production line. On the other hand, linescans give much more information of the wafers than 1-5 points measurements

These systems classify the samples, and give information to the automation system on the yield. By stopping the production if the quality of stock decreases, waste of expensive treatments can be avoided.

Product Solutions for Wafer Measurements in Production Lines

Product solutions for meeasuring wafers in a production line include:

WMT

WMT

CMS

CMS

WML

WML

This information has been sourced, reviewed and adapted from materials provided by Semilab Semiconductor Physics Laboratory.

For more information on this source, please visit Semilab Semiconductor Physics Laboratory.

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