Spectroscopic Ellipsometry - Table Top and Framed Spectroscopic Ellipsometers for Thin Film Characterization

Semilab designs, produces and sells metrology equipment for the characterization of semiconductor and photovoltaic materials, for monitoring the manufacturing process of semiconductor devices and solar cells, and also for R&D purposes in these areas. Semilab offers a variety of measurement techniques; most of them are non-contact and non-destructive.

Many of Semilab's technologies can be flexibly integrated in different platforms, ranging from simple handheld devices and table-top systems with high resolution mapping capability to fully automated stand-alone production control tools for mid-range and high-level fablines. Semilab also offers in-line measurements for solar cell production lines.

Table Top and Framed Spectroscopic Ellipsometers from Semilab

Semilab Products are based on more than 30 years of optical expertise in spectrometers and spectrographs.

Semilab offers a large family of Table Top and Framed Spectroscopic Ellipsometer to support Research and Development work on Thin Film characterization and Material Science.

Wavelength Coverage of Semilab Sopra

The wavelength coverage of Semilab Spectroscopic Ellipsometers is continuously expanding, from Far UV (135nm) to Far Infra-Red (33µm) with high resolution and/or fast measurement modes.

Spectroscopic Ellipsometers are proposed from manual to fully automated configuration with automatic sample loading from cassettes (SE5). Moreover, Semilab offers the possibility to combine several techniques like GXR, FTIR, Porosimetry onto the same R&D Ellipsometer to achieve more accurate diagnostics on complex structures. In this way more applications can be covered, supporting Semilab's leading position in the R&D field with more than 600 instruments installed worldwide.

This information has been sourced, reviewed and adapted from materials provided by Semilab Semiconductor Physics Laboratory.

For more information on this source, please visit Semilab Semiconductor Physics Laboratory.

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