UVISEL 2 Scientific Spectroscopic Ellipsometer

The UVISEL 2 available from HORIBA Scientific is a fully integrated and automated ellipsometer which has been specifically designed for industrial and research-oriented users. This advanced scientific instrument provides a high level of performance for micro and nano layer characterization.

The tool is integrated with a number of automated features that are handy for studying all types of materials. Features like patented sample vision and automated spot selection in the tool promote precise positioning of the measurement region and spot within the sample.

The system features what is touted to be the smallest patented achromatic spot size measuring 35 µm and is capable of covering a wide spectral range between FUV and NIR for minute sample area measurement.

The UVISEL 2, which is based on the DeltaPsi2 software, is user-friendly and delivers the required performance to distinguish existing as well as new structures and materials. The new, improved tool is highly sensitive and accurate and provides greater specification over other kinds of instruments.


Specifications of the UVISEL 2 Scientific Spectroscopic Ellipsometer are provided in the table below:

Wavelength Range 190 to 2100 nm (max)
Light Source 150 W Xenon
Measuring Time 50 ms/point
Accuracy Inquiry
Optical Resolution Inquiry
Angle of Incidence Automatic: 35°-90°
Film Thickness 1A to ~30um
Signal-to-Noise Ratio Inquire


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