MILA Mini Lamp Annealer - Rapid Thermal Annealing

The MILA-5000 series is designed to perform clean sample heating and ultra-fast heating and cooling operations, which are characteristics of the Infrared Gold Image Furnace RTA units. The MILA-5000 is capable of heating materials under modifiable atmospheres and integrates a protective quartz vacuum sample chamber and temperature controller into a compact system. Optional pumping allows the sample chamber to reach a vacuum level of 4e-6 mbar.

Operation and programming can be performed from the front panel, or through a USB connection to a computer. Software includes data monitoring and collection.

Key Features

The main features of the MILA-5000 series are:

  • Compact, table-top design
  • 50°C/s high speed heating
  • Accurate temperature control
  • Desired atmosphere from vacuum, air, gas, gas flow, etc. can be selected


The applications of the MILA-5000 series are:

  • Diffusion annealing
  • Crystal annealing of ferroelectric thin films
  • Glass substrate uniform temperature annealing
  • Oxide film deposition annealing after ion implantation
  • Sintering and alloying treatment of silicon and compound wafers
  • Catalytic effect testing
  • Temperature programmed desorption testing
  • Thermal cycle, thermal shock, thermal fatigue testing

Other Equipment by this Supplier