Motorized Tilt Rotation SEM Sample Holder by Phenom World

Every sample has its own specific demands. The shape of some samples requires flexible manipulation to obtain optimum imaging results. Samples can contain lines, holes, multi-layer structures or other specific features. To obtain the best image of these features, the operator needs to position the sample such that the opening angle towards the detector is optimized. The Motorized Tilt & Rotation Sample Holder provides the solution for imaging these features by tilting and rotating the sample.

The Motorized Tilt & Rotation Sample holder is controlled via a dedicated Pro Suite Software application. The computer-controlled operation enables smart rotation and tilting movements.

With the compucentric rotation function in the Motion Control software, this happens fully automatically. Tilting a feature causes a change in working distance and physical Y-position. The pseudo-eucentric tilt function auto-corrects the Z-height by adjusting the focus distance. The Y-position of the Phenom stage is corrected simultaneously, driven by the Motion Control software with these automated sample manipulation capabilities, it is possible to image any feature on any sample in an intuitive and convenient way.

The combination of motorized tilt and rotation introduces a new, wide range of sample–analysis options:

  • Creating 3D images by using a +/– 5° tilt is the fastest way to get stunning 3D image
  • Accurate tilting of the sample is mandatory to obtain quantitative 3D results
  • Collecting 3D data is now within reach, whereas the align X and Y functions help to align your feature with just two mouse clicks.

The Motorized Tilt & Rotation Sample holder is a so-called smart sample holder that does not have any cables attached. The sample holder interface board automatically identifies the sample holder type and will directly transfer tasks to the holder. This feature is completely in line with the well-known Phenom philosophy of creating easy-to-use and intuitive products.

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