Semilab offers LST-300A, a powerful system designed for monitoring bulk micro defect (BMD) profile of silicon samples.
The BMD analyzer disperses the incident light, which is captured by a CCD camera placed close to the cleaved border of the sample. The instrument is suitable for R&D applications and meets a wide range of needs.
The main features of the LST-300A BMD analyzer are:
- Autofocusing on the cleaved surface
- Fully automated, including half wafer handling
- Depth resolution: 0.5µm
- First particle detected within 0.5µm from the surface
- DZ determination from single image concentration distribution along the wafer diameter within minutes