Monitoring Bulk Micro Defect (BMD) Profile of Silicon Samples – LST-300A

Semilab offers LST-300A, a powerful system designed for monitoring bulk micro defect (BMD) profile of silicon samples.

The BMD analyzer disperses the incident light, which is captured by a CCD camera placed close to the cleaved border of the sample. The instrument is suitable for R&D applications and meets a wide range of needs.

Key Features

The main features of the LST-300A BMD analyzer are:

  • Autofocusing on the cleaved surface
  • Fully automated, including half wafer handling
  • Depth resolution: 0.5µm
  • First particle detected within 0.5µm from the surface
  • DZ determination from single image concentration distribution along the wafer diameter within minutes

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