PVS-5000 from Semilab is a high throughput PV wafer inspection and sorting system. The PVS-5000 is field proven and integrates high reliability wafer handling with PV metrology to enable a turnkey solution for incoming wafer sorting.
The PVS-5000 is ideal for sorting weak wafers which could break during the following production steps; for sorting based on resistivity and lifetime values, and for sorting of wafers with high contamination, vacancy density, and dislocations.
Customers using PVS-5000 are provided with expert support via the OEM metrology manufacturer across the globe.
The main features of the PVS- 5000 are listed below:
- High throughput
- Wafer input by loading from cassettes or stack
- Wafer output by sorting in different user-defined classes, collection in coinstack
- Minority carrier lifetime;
- Surface stains;
- Thinckness, TTV;
- Conductivity type;
- Full wafer photoluminescence map analysis.