PVS-5000: High Throughput PV Wafer Inspection and Sorting System

PVS-5000 from Semilab is a high throughput PV wafer inspection and sorting system. The PVS-5000 is field proven and integrates high reliability wafer handling with PV metrology to enable a turnkey solution for incoming wafer sorting.

The PVS-5000 is ideal for sorting weak wafers which could break during the following production steps; for sorting based on resistivity and lifetime values, and for sorting of wafers with high contamination, vacancy density, and dislocations.

Customers using PVS-5000 are provided with expert support via the OEM metrology manufacturer across the globe.

Key Features

The main features of the PVS- 5000 are listed below:

  • High throughput
  • Wafer input by loading from cassettes or stack
  • Wafer output by sorting in different user-defined classes, collection in coinstack

Sorting by:

  • Minority carrier lifetime;
  • Micro-crack;
  • Shape;
  • Surface stains;
  • Geometry;
  • Thinckness, TTV;
  • Resistivity;
  • Conductivity type;
  • Saw-mark;
  • Chute;
  • Full wafer photoluminescence map analysis.

Other Equipment by this Supplier