High Vacuum Pump Systems with Dry Compressing Fore Vacuum Pumps

Leybold offers ultra high vacuum pump systems, which are part of the PT DRY series and can produce a hydrocarbon-free vacuum. These wide range pumps are capable of achieving a superior vacuum when compared to traditional turbomolecular pumps, and hence scroll pumps and a hydrocarbon-free diaphragm can be used as a backing pump.

The PT Dry range is a turn-key, ready-to-use vacuum system.

The range of high vacuum pump systems includes:

  • Turbomolecular pump systems PT 80 DRY
  • Turbomolecular pump systems TURBOLAB 80
  • Turbomolecular pump systems PT 151 DRY
  • Turbomolecular pump systems PT 300 DRY
  • Turbomolecular pump systems PT 361 DRY

Specifications

The specifications of the TURBOLAB 80 Basic/TURBOLAB 80 Full Featured vacuum pumps are as follows:

  • Pumping speed: 65 l/s
  • Ultimate pressure: 1 x 10-7 mbar // 1 x 10-8 mbar
  • Connecting flange high-vacuum: DN 63 ISO-K // DN 63 CF
  • Mains connection: 88 - 264V, 50/60Hz
  • Accessories and spare parts available

Applications

The high vacuum pump systems are used in the following applications:

  • Coating
  • Analytical instruments
  • Research and development: Surface analysis, particle accelerators, and UHV- XHV systems
  • Semiconductor processes

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