TPD Workstation with a Highly-Precise Analyzer, Heated Sample Stage and Multiport UHV Chamber

The Hiden TPD Workstation is a complete experimental system that has been specifically developed for UHV temperature programmed desorption (TDS/TPD) studies. It is integrated with a multiport UHV chamber with heated sample stage, combined to a highly accurate triple filter analyzer with digital pulse ion counting detector to deliver unparalleled time resolution and sensitivity.

The triple filter mass analyzer is also configured with a cooled shroud to provide the analyzer with a high level of sensitivity with reduced background contributions to desorption products from the sample. For quick sample change, a fast sample load lock equipped with a sample transfer mechanism is included in the TPD Workstation.

The workstation comes as standard with Hiden’s TPD soft thermal analysis PC software that provides automatic control of sample temperature incorporated with analyzer control. The package also includes TPD analysis routines, such as peak deconvolution, integration, etc.

Key Features

The main features of the Hiden TPD Workstation are as follows:

  • High-precision triple filter quadrupole mass spectrometer with digital pulse ion counting detector
  • Multiport UHV chamber for attachment of extra instrumentation, such as Ellipsometry
  • Hiden 3F PIC mass spectrometer for rapid data acquisition
  • Heated sample stage to 1000°C with PID control module
  • Water cooled heated shroud for minimum outgassing and rapid cool down times
  • Mass filter shroud to improve sensitivity and reduce background species
  • Loadlock and linear sample transfer mechanism, including viewport and gate valve
  • Bakeout Jacket (200°C maximum)
  • Z-drive for improved positioning of sample and detector
  • Built-in software control of experimental protocols

Hiden TPDsoft Thermal Analysis Software

Following are the features of the Hiden TPDsoft thermal analysis software:

  • Automatic sample temperature and analyzer control
  • Real-time 3D bar view for easy and simple detection of unknown desorption products
  • TPD analysis routines for peak integration and deconvolution
  • Displays desorption data against temperature or time
  • NIST export function for identification of desorption species
  • Integrated mass spectral library
  • Windows 7/8/10 compatible with USB, Ethernet, and serial connections
  • Power requirements: 110/220/240 V, 50/60 Hz
  • System dimensions: 1590 mm wide x 725 mm deep x 1610 mm high


The Hiden TPD Workstation is used in the following applications:

  • Gas analysis
  • Residual gas analysis
  • Surface analysis
  • Surface science
  • Catalysis
  • Thermal analysis MS
  • Nanotechnology
  • Photovoltaics
  • Thin films, plasma, and surface engineering
  • Semiconductors
  • Hydrogen in metals

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