E-Series Plasma De-Contaminators from Evactron®

The Evactron E-Series Plasma De-contaminators offer superior performance in a compact design. These instruments are simplified plasma cleaners and use electron and ion beam devices such as SEMs, FIBs, and TEMs.

The E-series provides easy cleaning for higher resolution and contrast imaging. In addition to this, it improves probe and detector sensitivity, which are otherwise affected by contamination.

The Evactron E-Series Plasma Radical Source’s compact design makes it a flexible solution for either FIB/SEM chambers, sample prep chambers, or load locks. The E-series plasma cleaners provide rapid, efficient, and mild cleaning over a broad range of pressures enabling better quality, artifact free images, and optimized efficiency of sample analysis.

Key Features

The main features of the E-Series Plasma De-contaminators are as follows:

  • Energy proficient hollow cathode, capacitive coupled plasma (CCP)
  • Programmable power, number of cycles, cleaning time, recipes
  • “Pop” ignition (patent pending) at high level vacuum
  • Double action cleaning using UV afterglow and plasma
  • Broad range pressure function: 0.3 Pa/2 mTorr to 80 Pa/600 mTorr
  • Android or Windows GUI software
  • TMP compatible, and does not require advance venting
  • No match or gas flow adjustments required for plasma ignition
  • Vacuum safety interlock and an alternative external interlock connection
  • Rapid cleaning at a rate of 60 X+, which is quicker than formerly invented Evactron models
  • PRS can be installed on the load lock or the SEM chamber
  • Non-damaging to sensitive components - no stammer cut
  • Cleaning operation can be performed by just pressing a button..

Evactron E-Series Products

The Evactron E-Series products include ES and EP Plasma De-Contaminators.

Evactron ES Plasma De-Contaminator - It was designed specifically for OEM integration used for FIB, SEM, High vacuum, and other analytical devices. This basic Evactron Plasma Radical Source (PRS) utilizes air plasma after-glow to decrease hydrocarbon contamination, delivering results in a rapid and effective manner.

The system specifications for the Evactron ES system include:

  • 2U rack mount controller for system integration
  • FIB/SEM host directed control
  • Tiny compact Plasma Radical Source (PRS)
  • 100 - 240 VAC 50/60 Hz input
  • TUV/ CE/NRTL safety certified
  • RF Power: 10 - 20 Watts at 13.56 MHz CCP
  • RoHS Compliant
  • Optional hardware interlock

Evactron EP Plasma De-Contaminator - It is the latest model in the Evactron group of products. The EP system was intended to be user installed for the elimination of hydrocarbon contamination from high vacuum chambers, such as FIBs and SEMs. This decontaminator matches most of the models of FIB and SEM systems.

The system specifications for the Evactron EP system include:

  • Desktop controller with pushbutton feature
  • Hardware interlock and vacuum safety interlock
  • RF Power: 10 - 20 Watts at 13.56 MHz CCP
  • TUV/ CE/NRTL safety certified
  • Chassis dimensions: W×H×D: 17” × 3.4” × 6.7” (43 × 8.6 × 17 cm)
  • 100-240 VAC 50/60 Hz input
  • RoHS Compliant
  • Android tablet interface or Windows GUI (Option)

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