is a multifunctional device for performing the most typical tasks in the field
of Scanning Probe Microscopy.
The device is capable of performing more than 40 measuring methods, what allows
analyzing physical and chemical properties of the surface with high precision
and resolution. It is possible to carry out experiments in air, as well as in
liquids and in controlled environment. The new generation electronics provides
operations in high-frequency (up to 5MHz) modes. This feature appears to be
principal for the work with high-frequency AFM modes and using high-frequency
There are several scanning types implemented in NTEGRA
Prima: scanning by the sample, scanning by the probe and dual-scanning.
On account of that, the system is ideal for investigating small samples with
ultra-high resolution (atomic-molecular level) as well as for big samples and
scanning range up to 100x100x10 µm. The unique DualScan TM mode allows
investigating even bigger fields on the surface (200x200 µm for X, Y and
22 µm for Z) that can be useful, for example, for living cells and MEMS
Built-in three axes closed loop control sensors trace the real displacement
of the scanner and compensate unavoidable imperfections of piezoceramics as
non-linearity, creep and hysteresis. The sensors, which are used by NT-MDT,
have the lowest noise level, thus allowing working with closed loop control
on the very small fields (down to 10x10 nm). This is especially valuable for
carrying out nanomanipulation and lithography modes.
has a built-in optical system with 1 µm resolution, which allows imaging
the scanning process in real-time.
* E.g. the unique method of Atomic-Force Acoustic Microscopy (AFAM) allows
investigating soft and hard samples with carrying out quantitative measurements
of Young modulus in every scanning point. AFAM allows obtaining much better
contrast as compared to Phase Imaging Mode for the soft objects, and makes possible
the obtainment of contrast on the hard samples, what is a very hard task when
one uses other methods.