Apply Ultra-thin, Pin-hole Free, Uniform Coatings Via Plasma Deposition with the PD Series

Nordson MARCH's PD Series deposits materials during precision manufacturing processes by using plasma polymerization.

The PD Series for plasma deposition makes use of a gas vapor, or heated liquid monomer vapor delivery system in order to deposit coatings capable of reducing and in specific cases providing a tie layer, eliminating tackiness, acting as a drug enhancement or inhibition agent in life sciences applications and change desired surfaces from hydrophobic to hydrophilic, or vice versa.

Plasma polymer deposition can bring about a reduction in waste when compared to wet chemical dispensing.

Plasma Deposition Equipment Features

The heated liquid monomer vapor delivery system comprises of a heated vessel containing the liquid precursor which is temperature controlled in order to increase the vapor pressure of the precursor. The monomer vapor flow is delivered to the process chamber through a heated vapor flow controller exclusively configured for the monomer type. The vapor manifold in the plasma chamber is exceptionally designed for the particular application in order to enable uniform film deposition inside the chamber.

The polymer deposition is set off through optimum RF plasma energy exposure resulting in high quality films. In order to improve the properties of the deposited polymer films, pulsed plasma RF generation is also available. The PD Series permits selection from a range of process gases such as argon, helium and hydrogen. It is also possible to vaporize and deposit different liquid agents.

The PD Series systems integrate the best of Nordson MARCH’s market-leading plasma technology, along with application-specific developments that are backed by more than 30 years of experience. Each system makes use of the established benefits of Nordson MARCH's unique and patented designs that allow optimizing the use of the reactive ions present in RF plasma, which increases treatment uniformity while decreasing process time.

Models and Configurations

PD-1000 Plasma Treatment System: The PD-1000 system employs pulsed RF in order to improve the properties of plasma polymerized films and is considered to be perfect for either pilot, prototype or production processing of substrates. The PD-1000 incorporates the reliability and process quality of the AP-1000 system with the established benefits of Nordson MARCH's unique shelf design and optimized use of the reactive ions present in RF plasma, increasing treatment uniformity while decreasing process time.

The PD-1000 is a space and cost-efficient vacuum plasma treatment machine for treating different types of components and parts. The plasma chamber is made up of 11-gage stainless steel with aluminum fixtures for greater durability. The chamber comprises of multiple adjustable and removable shelves in order to accommodate different parts and accommodates up to 14 electrode positions. The PD-1000 is available in the standard type and is made up of two mass flow controllers for optimal gas control.

PD-1500 Plasma Treatment System: The PD-1500 system is considered to be an effective plasma treatment system with an extra-large chamber for batch processing. It employs a pulsed 40 KHz RF generator in order to improve the properties of plasma polymerized films. The PD-1500 is a space and cost-efficient vacuum plasma treatment machine ideal for treating all types of components and parts. The chamber, pump, control electronics and RF generator are all present within its enclosure. The PD-1500 system provides slide-out horizontal shelves for effortless loading and unloading.

Its service-friendly and compact design features a small footprint, and is designed for maintenance access from only the front and rear of the system. Thus, multiple vacuum plasma treatment systems can be arranged side-by-side in order to maximize floor space utilization. The pump is placed on rollers for effortless removal. In order to prevent unauthorized recipe modification, the control system can be password-protected at multiple levels. This guarantees reliable performance of the system from the first batch to the last.

The PD-1500 Plasma Treatment System incorporates the reliability and process quality of the AP-1500 system. The plasma chamber contains up to 14 electrode work shelves, and allows additional volume and greater substrate processing than the PD-1000. The PD-1500 is made up of four mass flow controllers for optimal gas control.

PD-Pro Plasma Treatment System: The PD-Pro system offers a large plasma processing cavity in order to treat large substrates or a number of smaller substrates. The PD-Pro, like the award-winning ProVIA™ Plasma Treatment System, delivers industry-leading plasma uniformity with the help of a single-step process. The PD-Pro is a self-contained system available with a compact, space-saving chassis with an easy-access, front-load door, and housing the plasma chamber, control electronics, vacuum system and 13.56 MHz power supply. The fast vacuum pump down and greatly enhanced process cycle times further add to the productivity and throughput of the system. The PD-Pro system comes standard and is made up of four mass flow controllers for optimal gas control and up to 13 vertical substrate processing cells.

The PD-Pro system presents unique vacuum and gas flow technology, superior temperature management and new electrode designs through extensive research and development. The careful balance of these critical design elements and process recipe parameters delivers a system that is capable of creating the most uniform treatment for significant applications.

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