Airborne Particle Sensor – ReticleSense®

The ReticleSense® from Cyberoptics can enhance equipment set-up and long term yields by wirelessly keeping track of airborne particles in real-time.

Speed equipment qualification with wireless measurements

Using the APSR and Particle View™ software, particle data can be collected and displayed wirelessly for real-time equipment diagnostics. It is possible to compare past to present as well as one tool to another with recorded particle data. Time can be saved by quickly locating contamination sources with the APSR data and the effect of cleanings, repairs and adjustments can be viewed in real time.

Shorten equipment maintenance cycles with reticle-like form factor

Detect particles in real-time without having to open the tool, thereby not exposing process areas to the environment. APSR goes where reticles go to find the place where particles contaminate reticles. Once the location of particles is found, tools may be selectively cleaned. Only open the dirty portion, the other clean areas should be kept clean.

Lower equipment expenses with objective and reproducible data

Raise the first-pass monitor reticle success, reduce qualification expense and boost availability with APSR. Receive early warning for impending equipment failures and enhance preventative maintenance plans. Establish a baseline from known clean tool, then cycle APSR through a candidate tool before committing monitor reticles.


  • Reticle-shaped - Also available in 150 mm, 200 mm and 300 mm wafer sizes
  • Measures particles greater than 0.14 µm - Reports particles in 0.1 µm and 0.5 µm bin sizes and larger particles in 2, 5, 10 and 30 µm bin sizes
  • Easy-to-use software - ParticleReview and ParticleView application software provides users with real time visual feedback and can record and replay logged data for review and analysis
  • Wireless - Transmits data to laptop or PC in real-time

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