ReticleSense from ® AMSR Cyberoptics offers speed vibration, leveling and humidity measurements with this all-in-one measurement device. It helps to improve yields.
Speed equipment qualification with wireless measurements
Gather and display acceleration, leveling, vibration and humidity data. Monitor humidity in reticle environments. The Auto Multi Sensor with MultiView™ and MultiReview™ software enables real-time equipment diagnostics. The effects of adjustments can be viewed in real-time, accelerating equipment alignment and installation.
Shorten equipment maintenance cycles with reticle-like form factor
6” reticle sensor travels wherever a reticle goes. Ensure the process areas are unexposed to the fab environment with vacuum compatible AMSR.
Lower equipment maintenance expenses and improve process uniformity with objective and reproducible data
Remove the human element out of altering equipment with objective measurements for multiple applications in one. Make the appropriate adjustments repeatedly and receive early warning for imminent equipment failures and enhance preventative maintenance plans.
Wireless, reticle-shaped and battery-powered - Available in 6” reticle-shaped form factor
Thin - 6.35 mm; standard 6” reticle format
Wireless - Transmits data wirelessly to your laptop or PC in real-time
Reports inclination in three dimensions - x, y and vertical
Reports Accelerations in three dimensions - x, y and z