Active Vibration Control for AFM

The AVI Series is a modular, low profile, active vibration isolation system realizing sub-hertz vibration isolation performance across all six degrees of freedom. The AVI Series is available in three regular sizes (AVI-200, AVI-400 and AVI-600) to house instruments of all sizes and shapes (from 0 – 9,000 Kg).

The isolation technology within the AVI Series consists of control electronics, piezoelectric sensors and actuators, which dynamically respond to vibrations within the environment and offer an attenuated signal to the top plate of the isolators.

The seamless installation process and lack of persistent maintenance of the AVI Series allows users to save money on installation costs while also saving time to concentrate on their research instead of their vibration isolation system.

Product Highlights

  • Industry leading low-frequency isolation: Active isolation from 1 to 200 Hz (0.5 – 200 Hz with the LFS System); passive isolation beyond 200 Hz
  • Isolate all vibrations: Isolates vibrations in all six translational and rotational modes of vibration
  • Active > Passive: No low frequency resonance means a lot better performance between 0 – 5 Hz than a passive system
  • Maximum stability and stiffness: 500 times stiffer than a passive system, which imparts superior directional and positional stability
  • Scalable to any instrument size: Module style allows system to adjust to specific loads and sizes, making it suitable for a wide range of applications
  • Seamless installation and use: Low profile design allows the AVI Series to be installed without the necessity of lifting equipment.

Selection Guide

To establish the applicable AVI Series model for the user’s instrument, compare the instrument’s weight and dimensions to the maximum supported area and load capacity figures below.

MODEL MAX SUPPORTED AREA LOAD CAPACITY
AVI-200S 24 x 24 inches / 610 x 610 mm Instruments Up to 700 lbs / 318 kgs
AVI-200M 30 x 36 inches / 762 x 914 mm Instruments Up to 1,000 lbs / 455 kgs
AVI-200XL 36 x 36 inches / 914 x 914 mm Instruments Up to 1,000 lbs / 455 kgs
AVI-400S 24 x 30 inches / 610 x 762 mm Instruments Up to 1,400 lbs / 636 kgs
AVI-400M 36 x 40 inches / 914 x 1,016 mm Instruments Up to 2,000 lbs / 909 kgs
AVI-400XL 40 x 40 inches / 1,016 x 1,016 mm Instruments Up to 2,000 lbs / 909 kgs
AVI-600S 24 x 36 inches / 610 x 914 mm Instruments Up to 2,100 lbs / 955 kgs
AVI-600M 36 x 48 inches / 914 x 1,219 mm Instruments Up to 3,000 lbs / 1,364 kgs
AVI-600XL 40 x 48 inches / 1,016 x 1,219 mm Instruments Up to 3,000 lbs / 1,364 kgs

 

Example: Atomic Force Microscope (AFM)

  • Weight: 220 lbs / 100 kgs
  • Dimensions: 24 x 24 inches / 610 x 610 mm
  • Relevant AVI Series Model: AVI-200S

Please Note: The maximum supported area and load capacity can be increased when extra isolators are used in the total platform (greater than two). The values shown above are for AVI-200 platforms with QTY 2 AVI-200 isolators used.

Popular Applications

AVI-200 AVI-400 AVI-600
Scanning Tunneling Microscopes (STM) Scanning Tunneling Microscopes (STM) Scanning Tunneling Microscopes (STM)
Atomic Force Microscopes (AFM) Scanning Electron Microscopes (SEM) Scanning Electron Microscopes (SEM)
Tribology Instruments Transmission Electron Microscopes (TEM) Transmission Electron Microscopes (TEM)
Spinstand Systems Ultra High Vacuum Scanning Probe Microscopes (UHV-SPM) Ultra High Vacuum Scanning Probe Microscopes (UHV-SPM)
Interferometers Ultra High Vacuum Scanning Tunneling Microscopes (UHV-STM) Ultra High Vacuum Scanning Tunneling Microscopes (UHV-STM)
Profilometers Lithography Tools Lithography Tools
Laser Frequency Stabilization Instrumentation Spectrometry Instruments Spectrometry Instruments
Surface Metrology Tools High-Precision Metrology Tools High-Precision Metrology Tools

And More!

Performance

The transmissibility graph shown below is a conservative estimate of the vibration isolation performance delivered by all AVI Series systems, relating to all rotational and translational modes of vibration (all six degrees of freedom).

transmissibility graph

Performance details:

  • Passive vibration isolation from 200 Hz and beyond
  • Active vibration isolation from 1 – 200 Hz (0.5 – 200 Hz when paired with the LFS System)
  • 99% vibration isolation at 10 Hz and beyond
  • 90% vibration isolation at 5.5 Hz
  • Low frequency performance can be improved with the LFS System Upgrade

Technical Specifications

TECHNICAL SPECIFICATIONS
Isolation Range: Active: 1 - 200 Hz; Passive: > 200 Hz
Transmissibility: See transmissibility curve. Above 10 Hz transmissibility <0.017 decreasing rapidly beyond 100 Hz, depending on load.
Correctional Forces: Maximum 12 N horizontally, 24 N vertically
Static Compliance (per module):  
    AVI-200: Vertical: Approximately 3.5 µm / N
Horizontal: Approximately 7 µm / N
    AVI-400: Vertical: Approximately 1.75 µm / N
Horizontal: Approximately 3.5 µm / N
    AVI-600: Vertical: Approximately 1 µm / N
Horizontal: Approximately 2 µm / N
System Noise: Less than 50 nG / √Hz
Power Consumption: 9 W (AVI-200), 18 W (AVI-400), 27 W (AVI-600)
Input Voltage: 90 - 125 VAC / 200 - 250 VAC, 50 - 60 Hz
Safety Class: 1
Performance Monitoring: A multiplexed signal for display on an oscilloscope shows sensor information with and without isolation

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