HORIBA’s top-selling baking system has been designed to fulfill the needs of current high-technology industries. The system has eliminated the need for a carrier gas to enable stable vaporization of materials such as H2O (at a rate of 2 SLM) and TEOS (at a rate of 600 SCCM). To enable easy access, complete device maintenance can be carried out from the front of the unit.
- Ability to perform complete device maintenance from the front of the unit
- High flow rate gasification
- Operating conditions of the LSC can be monitored and operation logs can be recorded and analyzed with the help of an optional PocketPC type PDA
- The LSC-A100 enables stable gasification of materials, for instance, H2O 2 SLM and TEOS 600 SCCM