He-Ion Microscope - The Carl Zeiss ORION PLUS Concept

The Carl Zeiss ORION® PLUS Helium ion microscope is a dramatic new break-through in microscopy, delivering images with never-before seen ultra-high resolution and material contrast, with five times better depth of field.

The ZEISS ORION® PLUS microscope is based on the revolutionary, atomic-sized, ALIS gas field ion source.

The ALIS scanning ion microscope uses a beam of helium ions as the imaging particles. Since ions can be focused into a smaller probe size and have less sample interaction than electrons, the ALIS microscope can generate higher resolution images with more material contrast so more detail can be seen. We expect to be able to see things much smaller than we've ever been able to see with even the most sophisticated scanning electron microscope (SEM).

Features of the ORION® PLUS Helium ion microscope include:

  • See your samples with sub-nanometer resolution in the world's first scanning helium ion microscope.
  • See low-Z materials, like carbon nanotubes, with resolution and surface information unavailable from a typical SEM.
  • See material contrast like you've never seen before. With a higher, more varied secondary electron yield, your images are sharp, clear and bright.
  • See insulating samples where charging effects are minimized by imaging with the unique back-scattered ion mode.

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