Hybrid Technology for Surface Metrology - 3D Profilometer

The 3D Profilometer from Rtec-Instruments is a hybrid technology for surface metrology.

Multiple Imaging Techniques

The 3D Profilometer measures volume wear, roughness, step heights, film thickness, defects and more at sub nanometer performance.

Modular Design

Mix and match module per requirement
Easy to incorporate new modules in future

Add-On Mechanical Testing

Rtec-Instruments’ mechanical property testing modules can be incorporated to the profiler

Flexibility

Perform numerous ISO, ASTM, DIN measurements
Incorporate modules any time

Platform Specifications

Standard motorized stage 150x150 mm (Optional 210x310 mm)
Vertical range up to 100 mm
Tip tilt stage 6°
XY resolution 0.1 µm
Standard turret, motorized turret optional

Imaging Combinations

Any of the modules can be integrated

Sigma - 3D

White Light Interferometer

Microscope - 2D

Optical Microscope

Lambda - 3D

Confocal + White Light Interferometer

Add AFM - 3D

AFM can be combined with Sigma or Lambda

Unlimited Applications

Combination allows measurement of virtually any kind of sample.
Material research
Semiconductor
Coating
Tribology, wear, corrosion
Glass, sapphire
Biomedical

Optional Hardware Upgrades

Automatic turret
Large stage/platform
Anti-vibration table
Ergonomic joystick

Hybrid Technology for Surface Metrology - 3D Profilometer

Roughness, Texture Finish
Profile, Topography
Volume Area
Step Height
Defects, Particles
Film Thickness
Cross Section Profile - Picture 1
Cross Section Profile - Picture 2
Material research
Semiconductor
Coating
Tribology, wear, corrosion
Glass, sapphire
Biomedical
Automatic turret
Large stage/platform
Anti-vibration table
Ergonomic joystick
Stitched 3D Image
Scratch setup with Profiler
Profiler with Rockwell TIP

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