Creating Precise Optical Films with the Reticle

The Angstrom Reticle is a system that allows optical designers to produce films of top purity and density, with even deposition, using a repeatable and fully automated process. This enables several features to be utilized to create precise thickness control:

Apex Optical Monitor

Apex is an optical monitoring system from Angstrom which allows monitoring of the process in situ, either directly or indirectly, at the variable angle stage. This prevents having to use tooling factors or a witness glass changer.

In situ Ellipsometry

The availability of in situ ellipsometry allows the acquisition of data on the optical film performance during the deposition stage itself. The termination of the layer from the information gained by ellipsometry is completely meshed to Aeres. Several different multi-wavelength and spectroscopic ellipsometric platforms are provided.

Quartz Crystal Microbalance (QCM)

This system has a QCM with shutters located in proximity to the substrate, which allows the operator to get information on the rate at which the film is being deposited and its thickness at each instant. The QCM is utilized to calibrate the initial rate of deposition and then a fixed beam current is switched on to complete the layer thickness in a controlled period. When shutters are used the crystal has a much longer operating life when the deposition process is prolonged or if the system used has a load lock.

Creating Precise Optical Films with the Reticle

Apex Optical Monitor
In situ Ellipsometry
Quartz Crystal Microbalance (QCM)
Reticle

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