Nebula Cluster System and Cluster Integration

Angstrom has produced a completely automated sequencing tool on the Nebula Cluster system, taking advantage of Aeres control software.

The algorithm developed by Angstrom is for cluster-specific sequencing and is integrated with Aeres process control software so that systems with multiple modules may be operated with great efficiency. These may include stations for cleaning, load locks for the substrate and the mask, and several deposition chambers or process modules.

This Nebula cluster sequencing algorithm is built on a simple design, which sets up sequences by the assignment of substrates, masks and recipes for deposition or cleaning, to the cluster module which is to be used.

Once this sequence is created, they enter a global queue which then ensures that they are processed within the assigned order, so that the user controls the process by the recipe entered. Thus, a simple system is used to enable advanced scheduling abilities for the user.

The first step is to load the substrates and masks into the chosen module. The Aeres software program gives each of these a unique identifier to define them. After this the user can build the sequences to the desired level of complexity, since they are completely user-regulated.

By way of illustration, supposing three substrates and two masks are loaded into a load lock module which is in a Nebula cluster platform consisting of two deposition chambers, A and B, it is possible to set up a sequence in which substrate one enters a deposition cycle with mask one in A. Afterwards, deposition of substrate one, again, with mask two is carried out in B.

The next step is a deposition run of substrate two with mask three in A, and so on. The steps may be combined in any desired order, and more than one sequence may operate at the same time to make it as efficient as possible.

Cluster Integration

Cluster Integration - Picture 1
Cluster Integration - Picture 2
Cluster Integration - Picture 3

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