Residual Gas Analyzers (RGA)

Many research and industrial processing companies across the globe utilize Residual Gas Analyzers (RGA) to classify gases located within vacuum environments.

There are 3 grades of RGA systems available from Extrel, which range in ability. The classic Extrel RGA is a basic and economical RGA system. Next, the moderate MAX-LT RGA system allows improved sensitivity and mass range for current chambers. Finally, the diverse MAX system, which provides exceptional resolution and sensitivity to fit the customers’ requirements. The MAX-QMS Series can locate a minimum of 10 parts per billion (ppb) to 100% as the most accurate and repeatable measuring system currently available.


  • Product characterization
  • Look for contaminants in semiconductor processing systems
  • Check for possible leaks in vacuum furnaces
  • Search for gases desorbing off of the walls of ultra high vacuum (UHV) chambers
  • Monitoring headspace of fermentors
  • Check for possible leaks in vacuum furnaces

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