Thin Film Measurement System - MProbe Vis

The MProbe Vis is a useful probe that can quickly and reliable measure translucent or and/or lightly absorbing films. These types of films include, but are not limited to Oxides, Nitrides, Photoresists, Semiconductors (Si, aSi, polySi), Polymer coatings (Paralene, PMMA, Polyamides), Hard coatings (SiC, DLC), Polymers, thin metal films and many more.

LCD, FPD application: ITO, Cell Gaps, Polyamides

Optical Coatings: dielectric filters, hardness coating, anti-reflection coating

Semiconductor and dielectrics: Oxides, Nitrides, OLED stack

Product Features

  • Thickness Range: 10 nm- 75 mm
  • Wavelength Range: 400 nm - 1000 nm
  • Real time measurement and analysis
    • Capable of analyzing various types of layers:
      • Multi-layer
      • Thick
      • Freestanding
      • Nonuniform
  • 500+ materials library
    • User can easily add new materials
    • Supports parameterized materials:
      • Cauchy
      • Tauc-Lorentz
      • Cody-Lorentz
      • EMA
  • Flexible
    • Desktop or in-situ
    • R&D on inline
    • Can be easily integrated with external system through the use of a TCP Modbus interface
  • Both thickness, optical constants and surface roughness can be easily measured
  • User friendly
    • Measurement and analysis is achieved through one-click
  • Powerful tools:
    • Simulation & sensitivity
    • Background
    • Scaling correction
    • Linked layers and materials
    • Multi-sample measurements
    • Dynamic measurement
    • Production batch processing

MProbe Advantage

  • Remote diagnostics
  • Standalone software included
  • Measurement history for recall and display (plots and statistics)
  • Compare and evaluate multiple reflectance/ transmittance spectra
  • Microprocessor controlled light source with 10000+ hours lifetime
  • Correction options for angle, wavelength resolution and intensity variations
  • Free software update for 12 months
  • Clean room class 1000 compatible

What is Included in the Box?

  1. Main unit (spectrometer/light source/electronics)
  2. Reflectance probe VisNIR
  3. Sample Holder SH200A with VisACH focusing lens
  4. Calibration set
  5. Si oxide test wafer (200 nm)
  6. TFCompanion - RA software
  7. Power adapter and USB cable

Specification

Thin Film Measurement System - MProbe Vis

Measurement of 200nm Si oxide film. Measurement vs. model data fit.
MProbe system (desktop configuration)
Raw reflectance from Si wafer. Signal maximum (16 bit). Integration time: 10ms. Regulation of lamp intensity controlled from the software.

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