The Thermo ScientificTM Phenom Pharos is a desktop SEM equipped with a FEG source that provides crisp, high-brightness images. With the Phenom Pharos, the advantages of a FEG source are now accessible to everyone. Its operation is simple, from the preliminary installation to the actual usage, because of its intuitive and compact design.
The modern hardware design and detectors allow rapid imaging and easy foolproof handling.
Specifications
| |
Phenom Pharos Desktop SEM
 |
Phenom XL Desktop SEM
 |
Phenom ProX Desktop SEM
 |
| Light optical magnification |
20– 134x |
3 - 16x |
20 - 134x |
| Electron optical magnification range |
200– 1,000,000x |
80 - 100,000x |
80 - 150,000x |
| Resolution |
4 nm (BSD) & 3 nm (SED) |
< 14 nm |
< 10 nm (BSED) & < 8 nm (SED) |
| Digital zoom |
Max. 12x |
Max. 12x |
Max. 12x |
| Light optical navigation camera |
Color |
Color |
Color |
| Acceleration voltages |
Default: 5 kV, 10 kV and 15 kV
Advanced mode: adjustable range between 2 kV and 15 kV |
Default: 5 kV, 10 kV and 15 kV
Advanced mode: adjustable range between 4.8 kV and 20.5 kV imaging and analysis mode Secondary Electron Detector |
Default: 5 kV, 10 kV and 15 kV
Advanced mode: adjustable range between 4.8 kV and 15 kV imaging and analysis mode |
| Vacuum modes |
• Charge reduction mode (low vacuum mode)
• High vacuum mode
• Medium vacuum mode |
• Charge reduction mode (low vacuum mode)
• High vacuum mode
• Medium vacuum mode |
• Charge reduction mode (low vacuum mode)
• High vacuum mode |
| Detector |
• BSD
• EDS (optional)
• SED (optional) |
• BSD
• EDS (optional)
• SED (optional) |
• BSD
• EDS
• SED (optional) |
| Sample size |
• Up to 32 mm (Ø) |
• Max. 100 mm x 100 mm
• Up to 36 x 12 mm pin stubs |
• Up to 32 mm (Ø) |
| Sample height |
Up to 100 mm (h) |
Max. 65 mm |
Up to 100 mm (h) |