Compositional Mapping and Analysis with Micro X-Ray Fluorescence - AttoMap

The Sigray AttoMap™ is a revolutionary X-ray analytical microscope with the highest sensitivity and highest resolution laboratory micro X-ray fluorescence (microXRF) capacity available.

The system provides the powerful performance of third generation beamline synchrotron capabilities in a laboratory microXRF through patented innovations in its x-ray source and optics. Capabilities include:

  • Unprecedented sensitivity (within a second)
    • For trace elements: sub parts per million (sub-ppm) and sub-femtogram sensitivities
    • For dopants: 10^13 to 10^14 atoms per cm^2
    • For thin films: sub-angstrom equivalent thickness
  • Non-destructive acquisition, with rapid throughput down to 5 ms/point
  • <10 micrometer spatial resolution
  • Fundamental parameters for quantification without standards

Research Applications of the AttoMap

Due to its orders of magnitude higher sensitivity and non-destructive acquisition within seconds, AttoMap enables cutting-edge research in a broad range of fields:

  • Semiconductor: Measurement of 3D structures for dopants and thin films used in next-generation logic, memory, and packaging
  • Mineralogy: Composition for correlative information with SEM-EDS based techniques, but at orders of magnitude higher sensitivity
  • Metallomics: Metalloprotein and nanoparticle distribution in tissue at cellular resolution
  • Advanced Materials: Compositional mapping to determine compositional uniformity, contaminants, and migration of elements
  • Forensics: Ultrahigh sensitivity for reliability in hair analysis, paint chips and gunshot residue determination, and more

For both point analysis and for larger regions, including specific regions of interest or the complete sample, elemental composition and their relative percentages can be gathered. For ultimate flexibility in analysis, data is collected and stored as a hypermap, with each pixel and its spectra.

Examples of Results

The AttoMap provides point analysis and chemical imaging. Examples can be seen below.

Automated thickness and layer measurements:

20 um micropillar layer thickness measurements. Left is an automatically segmented map of micropillar bumps (each bump is assigned a “color” as a number) and right is the histogram distribution of layer thicknesses with mean and standard deviations.

Figure 1. 20 um micropillar layer thickness measurements. Left is an automatically segmented map of micropillar bumps (each bump is assigned a “color” as a number) and right is the histogram distribution of layer thicknesses with mean and standard deviations.

Quantification capabilities of the AttoMap. Fundamental parameters of the acquired spectrum (left) can be used to determine the weight percent composition of samples.

Figure 2. Quantification capabilities of the AttoMap. Fundamental parameters of the acquired spectrum (left) can be used to determine the weight percent composition of samples.

Chemical mapping for distribution of elements (such as minerals in geology or composition for new materials) at down to 5 ms/point for large area scans. Non-destructive for follow-on analysis with additional techniques:

Large area geological scan of 105 x 107 mm area. AttoMap has sensitivity for trace minerals, such as rare earth element distribution. Shown in yellow is yttrium.

Figure 3. Large area geological scan of 105 x 107 mm area. AttoMap has sensitivity for trace minerals, such as rare earth element distribution. Shown in yellow is yttrium.

Simultaneous acquisition of all elements:

Interface for AttoMap, showing heat maps of specific elements of interest to the user. Display of elements of interest can be selected from the software periodic table of elements interface.

Figure 4. Interface for AttoMap, showing heat maps of specific elements of interest to the user. Display of elements of interest can be selected from the software periodic table of elements interface.

Compositional Mapping and Analysis with Micro X-Ray Fluorescence - AttoMap

Quantitative Composition
Layer Thickness
Trace Element and Nanoparticle Analysis

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