FRT MicroProf® TL enables the characterization of vertical and lateral deformation of samples under thermo load. Unlike other models of the MicroProf® family, the “TL” is fitted with the thermal unit from FRT — a built-in heating and cooling plate— and optionally a MicroDAC® 2D deformation sensor supplied by CWM.
Using the thermo unit, the behavior of modules under “real conditions” can be determined or the process steps under thermal load can be replicated.
If required, the thermo unit can also be integrated into other devices of the MicroProf® series.
- Programmable temperature control from −80 °C to 400 °C
- Optical surface metrology at various sample temperatures
- Fast heating and cooling rate
- Completely automated
- Temperature stability of <1 °C
Optical Surface Metrology at Different Sample Temperatures