The Glovebox Integrated ALD system from OkyayTech comprises a stainless steel reactor chamber with substrate sizes of 100, 200, and 300 mm.
It also has up to eight precursor lines, heated gas manifold and delivery lines, solid/liquid/gas precursors delivery, MFC controlled purge/carrier gas, and GUI/Recipe controlled isolation valve.
The Glovebox Integrated ALD system can be heated to a temperature of up to 250 °C standard (400 °C optional). The precursor lines can be individually heated up to 200 °C.
Application areas are; perovskite and tandem photovoltaic cells, ALD for energy storage and conversion, and catalysts via ALD. OkyayTech is working with corporate clients to develop ALD recipes and deposition tools for Perovskite-Silicon Tandem Solar Cells Research
- Easy-to-use GUI
- Fully automated with recipe control
- High aspect ratio 3D Surround Coat™ for high surface area coating
- Top-notch scientific support team and recipe library