miniZ Water Vapor Desorption System

The miniZ is one of RBD Instruments’ family of water vapor desorption/oxidative hydrocarbon removal systems. This water vapor desorption system includes a high-power UVC emitter that fits within a typical 1.5″ I.D. vacuum chamber tube, and a small power supply which can be directly fitted on the 2.75″ CF flange.

The miniZ is suitable for solving water vapor issues in compact vacuum chambers such as the Kimball Physics Multi-CF series of spherical chambers, pressure cells, mini ALD chambers, and load locks.

The miniZ power supply is simple to operate — users simply have to turn it on when they begin pumping. A remote ON/OFF option is provided if users want to run the miniZ by a process controller or set point.

Flange sizes available — 2.75″ and 4.5″ CF.

Technical Information

UVC radiation of 185 nm offers the apt wavelength of energy to desorb water vapor molecules from the chamber walls, while facilitating faster chamber pump down times and lower ultimate vacuum.

The system creates 350 µW/cm2 at 6 cm distance from the end of the emitter (2.75″ flange).

miniZ Water Vapor Desorption System

Image Credit: RBD Instruments

miniZ Water Vapor Desorption System

Image Credit: RBD Instruments

 

 

Video Credit: RBD Instruments

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