Octiv Suite 2.0 - Diagnostic Radio Frequency Probe for Plasma Measurement

The Octiv Suite RF diagnostic (VI Probe) from Impedans is an in-line RF voltage, phase, current, plasma, and harmonics diagnostic system. The Octiv Suite has the ability to quantify all the RF power parameters, break them down into individual components, and reconstruct the waveform of several fundamental frequencies at the same time.

This sophisticated system can even quantify plasma parameters like ion flux by employing the RF electrode as a sensor. The Octiv Suite is a genuine top-class system with respect to the delivery of power into a plasma reactor.

The Octiv Suite measures phase, current, voltage, harmonics, and impedance. The measurements can be viewed directly in the meter unit or from a PC.

Features

  • Waveform display
  • Fully customizable form factor
  • Plasma parameter measurement
  • Match and post-match integration options

Applications

  • Fault detection
  • Process health indexing
  • Process fingerprinting
  • Ion flux sensing
  • Chamber matching
  • Process control
  • Wafer misplacement detection

Overview

The Octiv Suite probe is an exclusive, sophisticated technology that enables researchers to assess complex inter-dependencies of RF parameters in areas like plasma process performance. It quantifies and displays the complex waveform. The software extracts and studies the main RF parameters like current, voltage, and phase of all the complex components that form the waveform.

It is possible to use the Octiv Suite RF diagnostic (VI Probe) to diagnose plasma parameters like non-linear sheath impedance, plasma resistance, and ion flux. The Octiv Suite characterizes a non-linear load with multiple basic frequencies, as well as high harmonic and intermodulation components.

The Octiv Suite exclusive software algorithm precisely analyzes the phase of harmonic, multi-frequency, and intermodulation components. It also enables reconstruction of the multi-frequency combined waveform or individual component waveforms.

The Octiv Suite probe is the first and only commercially available product with the potential to precisely analyze multiple basic frequencies, as well as harmonic and intermodulation components, in pulsed power (AM) applications (with a time resolution of 1 μs) and frequency-agile (FM) applications.

The Octiv Suite RF diagnostic (VI Probe) enables users to gain insights into new processes like pulsed plasma or multi-frequency applications. It analyzes RF waveforms to quantify plasma parameters like ion flux. Wave-form reconstruction using the Octiv Suite offers a better understanding of variations in load impedance. This is highly important for applications like tool-to-tool comparisons and chamber matching.

The Octiv Suite offers the potential for analyzing process endpoint, as well as for multivariate fault detection and classification through harmonic analysis. The measurement RF parameter assists with process fingerprinting.

An exclusive feature of the Octiv Suite is its potential to analyze the power spectra of a process, a major parameter of multi-frequency applications. Worn components, poor RF connections, and variations in process chemistry are detected by using impedance analysis. The Octiv Suite offers users the confidence to analyze multi-frequency components, as well as their effect on the process.

RF Parameters Measured

  • Phase (time resolution of 1 μs)
  • Current (time resolution of 1 μs)
  • Voltage (time resolution of 1 μs)
  • Impedance (time resolution of 1 μs)
  • Harmonics (time resolution of 1 μs)
  • Ion flux

Measurement Functionality

Time-Averaged Measurements

Time-averaged measurement offers an average over time of voltage, phase and current.

Time-Resolved Measurements

Time-resolved measurement facilitates synchronization of the current, phase, and voltage measurements using an external synchronization signal. Detailed information on the ion energy distribution can then be obtained as a function of phase or time through the synchronization pulse period. The pulse period would typically be on a timescale of milliseconds to microseconds.

Time-Trend Measurements

Time-trend measurements enable users to acquire information on the changes in the current, voltage and phase with the advancement of time through a specific process. This feature avoids the need for external synchronization, and the timescales involved can vary from seconds to hours.

Smith Chart Measurements

The load impedance is displayed on a Smith Chart and thus can be easily monitored. Variations in impedance can be tracked through the entire process cycle.

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