Q300T T Plus: Triple Target Sputter Coater for Thin Films

The Q300T T Plus from Quorum Technologies is a large-chamber, turbo-pumped coating system that is best suited for sputtering a single large diameter specimen measuring up to 8″/200 mm or multiple smaller specimens across a similar diameter.

The Q300T T Plus is suitable for thin-film applications and SEM/FE-SEM. It is equipped with three sputtering heads to guarantee uniform deposition of individual large specimens or several smaller specimens.

Triple sputtering head with automatic shutter closed

Triple sputtering head with automatic shutter closed. Image Credit: Quorum Technologies.

NB: It must be noted that sequential sputtering of three different sputtering metals from each sputtering head is not feasible—for sequential coating, Q300T D Plus must be used.

Key Features

  • 16 GB memory can store over a 1000 recipes
  • Ultimate vacuum of 5 x 10−5 mbar or less can be achieved
  • New multi-color LED visual status indicator
  • New touch and swipe capacitive screen
  • Multiple-use profiles can be configured on a single machine
  • USB port for upgrading and downloading process log files
  • New software sorts recipes per user, based on recent use
  • Interchangeable stage options

Recommended Applications for Q300T T Plus

  • Multiple sample preparation for SEM
  • Wafer inspection

These products are intended for Research Use Only.

Other Equipment by this Supplier