Scout 350 HAR: Atomic Force Microscopy Probe for Semiconductors

The NuNano Scout 350 HAR is available as a pack of 10 AC mode silicon AFM probes provided with a tip of high aspect ratio. Best suited for deep trench imaging using non-contact/tapping modes in air, the Scout 350 HAR probes can be used for hard and stable softer samples.

Users can order the Scout 350 HAR probes without a coating or even with an aluminum or gold reflex backside coating.

NuNano Scout 350 HAR

Features

  • Rectangular shape
  • Resonant frequency in the range of 300–400 kHz
  • Resistivity of 0.015–0.025 Ωcm
  • Spring constant in the range of 25–70 N/m
  • Thickness in the range of 4.0–5.0 µm
  • Length in the range of 123–127 µm
  • Width in the range of 28–32 µm
  • Built using n-type antimony silicon material

Tip Specifications

  • Conical shape
  • Cone angle range of 15°–40°
  • Height in the range of 5–8 µm
  • Resistivity of 0.015–0.025 Ωcm
  • Radius of <10 nm
  • Set back range of 6.5–8.5 µm
  • Built using n-type antimony silicon material

 Optional reflective coatings 

  • Aluminium (SCOUT 350 HAR RAl): Frontside/Tip - None, Backside/Reflective - 40 nm Al
  • Gold (SCOUT 350 HAR RAu): Frontside/Tip - None, Backside/Reflective - 5 nm Ti, 50 nm Au

Other Equipment