TOFWERK’s pgaTOF mass spectrometer is a sensitive, real-time analyzer, designed for monitoring and control in crucial semiconductor applications.
- Quick and sensitive mass spectrometric monitoring: The TOF mass analyzer allows real-time monitoring of all process species with isotopic mass resolution at sub-second refresh rates
- Available for diverse semiconductor applications: Reactor health state (RHS) monitoring, process optimization, plasma diagnostics, end-point detection
- Large dynamic range: All byproducts, precursors and trace species in semiconductor processes are detected at the same time
- Background reduction with notch filter technology: Specific abundant species can be attenuated to control mass spectral interferences
- Long-term stability: Precise and reproducible response
- Robust and mobile: Flexible, rugged configuration allows portability for non-invasive detection and ensures precision in adverse environments
- Powerful software: Simple control interface with a fully documented API for system integration
Image Credit: TOFWERK
Specifications
Source: TOFWERK
| |
Corrosion
Resistant |
Operate in
Any Position |
Resolving Power
M/ΔM |
Sensivity
cps/ppb |
LOD
ppb/s |
Size
kg | cm |
| pgaTOF 2R |
yes |
yes |
8000 |
>10 |
<1 |
160 | 148 x 48 x 62 |
| pgaTOF R |
no* |
yes |
4000 |
>10 |
<1 |
85 | 90 x 40 x 53 |
| pgaTOF S2 |
yes |
yes |
800 |
>10 |
<1 |
93 | 112 x 47 x 47 |
*-corrosion-resistant version is readily available